Product Overview
Benchtop Electrostatic Chucking and Dechucking Station with Handheld Racket and kV, nA Readouts
Condition
Used, clean, and in great cosmetic condition with very few signs of use. Tested to power up only; no further function testing. No model number is marked on the unit. Markings legible: ProTec, Dechucking, Chucking, Contact, Vacuum, Vac. Ext., Purge, Purge Ext., Voltage (kV), Current I (nA) II (10x nA), Fuse MC, Main 100-240V AC, External N2, VAC, Exhaust, Racket, and a blue front label reading PETC1D8100.
Ships from our Idaho warehouse the same or next business day. We've been selling online since 1999.
Product Overview
Manual electrostatic chucking puts a wafer on a carrier by hand and holds it with charge instead of clamps. This ProTec station does that job from the bench: a handheld racket on a stand with its own cable, an amber ring platform with white pegs, and five front panel controls labeled for each step.
Key Features
- Five front controls labeled Dechucking, Chucking, Contact, Vacuum over Purge, and Vac. Ext. over Purge Ext.
- Digital readouts for Voltage (kV) and Current, with green and red indicator lamps
- Current range switch on the rear: I (nA) and II (10x nA)
- Rear External N2, VAC and Exhaust push-in ports
- Rear Racket connector for the handheld unit
- Main 100-240V AC inlet with switch, plus a Fuse MC holder
- Racket bipolar manual wafer chuck unit, for manual electrostatic chucking and dechucking
Applications
- Hand-loading wafers onto electrostatic carriers in a development lab
- Backing up a manual chucking station on a line that already uses ProTec carriers
- Process trials where nitrogen and vacuum lines are already plumbed to the bench
Frequently Asked Questions
What power does it take?
Main 100-240V AC, as marked at the rear inlet.
Does it need gas and vacuum lines?
Yes. The rear carries External N2, VAC and Exhaust ports, and the front has Vacuum and Purge buttons.
Is it sold tested to power up only?
Yes. It powers up, and no chucking cycle was run here. You get the station, the racket and the parts shown, clean and lightly used, and you take on proving it with your own wafers and carriers. Flat-rate shipping in the lower 48, and orders over the free-shipping line ship free.
Its panel spells out the whole job in five labeled controls, from Dechucking to Purge Ext.
